Plasma discharge for antireflection coating of PV cells

Faculty	Engineering	Year:	2014
Type of Publication:	ZU Hosted	Pages:
Authors:	Mohamed Ahmed Hanafy Mahmoud Elshaer Staff Zu Site Abstract In Staff Site
Journal:	Southern African Solar Energy Conference SASEC	Volume:

Keywords :	Plasma discharge , antireflection coating , , cells
Abstract:	Homogeneous plasma dielectric barrier discharge is used to deposit antireflection thin films of hydrogenated silicon nitride on solar cells. The coating is made by a plasma discharge containing mainly SiH4 and NH3 diluted in argon at atmo

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