Computerized Langmuir Probe Measurements in a Capacitively Coupled RF Discharge

Faculty Engineering Year: 2007
Type of Publication: ZU Hosted Pages:
Authors:
Amgad Elsayed Soulaiman
Journal: 28th ICPIG, July 15-20, 2007, Prague, Czech Republic 28th ICPIG, July 15-20, 2007, Prague, Czech Republic Volume:
Keywords : Computerized Langmuir Probe Measurements , , Capacitively Coupled    
Abstract:
A system of automated computerized Langmuir probe measurements is used in order to determine the plasma parameters in a plasma reactor constructed for cleaning of metallic artifacts by RF discharge. A compensated probe insures the suppre
    
     
 
       

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